MEMS Pressure Sensor

MEMS Measurement Principle

The core part of the MEMS pressure sensor is a piezoresistive pressure sensing die processed by MEMS technology. The pressure sensing die is composed of a springy diaphragm and four resistors integrated into the diaphragm. Four piezo-resistors form a Wheatstone bridge structure.

When the springy diaphragm is pressured, the Wheatstone bridge will output a linear proportional voltage signal with the pressure on. Without pressure changes, there is no output thus consumes less power.

MEMS Pressure Sensor Construction

Introduction

MEMS pressure sensor integrates pressure sensing element and digital conditioning chip, compensating the drift, sensitivity, linearity parameters digitally. Relying on the voltage power supply, this pressure sensor outputs a standard voltage signal which is calibrated and compensated. It is suitable for the pressure measurement of non-corrosive pure gases.

Based on MEMS technology and SOP, DIP, COB packages, etc., MEMS series pressure sensors are designed for pressure measurement of non-corrosive pure gases. 

Advantages

Applications

Relying on features of small size, low cost, etc. MEMS pressure sensor is widely used in biomedicine, automotive electronics, and so on.

·For medical fields, such as electronic sphygmomanometer, breathing machine, oxygen generating equipment, patient monitor, etc.

·For automotive electronics fields, such as tire pressure gauge, brake booster, power steering, and MAP sensor, etc.

·For small home appliances fields, such as water heater, dishwasher, water purifier, small crisper, etc.

·For wearable equipment fields, such as intelligent bracelets, watches, etc.

·For fitness equipment fields, such as massagers, massage chairs, air beds, etc.

·Other fields, such as vacuum pump, vacuum generator, compressor, pressure meters, etc.

Pressure Sensor Based on MEMS Technology

The pressure sensor is mainly composed of a diaphragm, a MEMS chip, an insulating cover, a compensation circuit, and an O-ring. Among them, the MEMS chip is the core pressure-sensing element. If it is in direct contact with the measuring medium such as water, oil, and air, the performance and service life will be affected. Therefore, the MEMS chip needs to be protected by a packaging process to avoid the influence of the measuring medium.

MEMS pressure sensors are manufactured by Micro Sensor's fully automated production line and advanced technology. They use the piezoresistive effect principle of diffused silicon material to achieve pressure measurement. The piezoresistive pressure sensors based on MEMS technology have higher stability and reliability.